Picosun-SINANO Collaboration Yields Excellent TiN Process
Retrieved on:
Wednesday, September 26, 2018
TiN is metallic as well, and its conductivity and thermal stability are better than those of pure titanium metal, but to obtain high quality TiN films, the manufacturing method and conditions are critical.
Key Points:
- TiN is metallic as well, and its conductivity and thermal stability are better than those of pure titanium metal, but to obtain high quality TiN films, the manufacturing method and conditions are critical.
- Furthermore, the process window is wide regarding the process parameters and temperature, enabling the process to be introduced on a large variety of substrate materials.
- "We are happy to report these excellent TiN results to our customers in micro- and optoelectronic industries.
- TiN is a central material in their applications, especially in components manufactured on GaN and on small, up to 200 mm diameter Si wafers.