Critical dimension

Gauss Labs and SK hynix Publish the Latest Results on AI-based Semiconductor Metrology Technology at SPIE AL 2024

Retrieved on: 
Thursday, February 29, 2024
Acquisition, AOM, Critical dimension, Noise, Sale, Society, SPIE, Virtual metrology, Research

SEOUL, South Korea, Feb. 29, 2024 /PRNewswire/ -- SK hynix Inc. (or "the company", www.skhynix.com) and Gauss Labs announced today that they participated in the SPIE AL* 2024, an international conference held in San Jose, California, and presented two papers based on the latest technology for AI-based metrology.

Key Points: 
  • In the paper "Model Aggregation for Virtual Metrology for High-Volume Manufacturing," Gauss Labs introduces "aggregated AOM*", an algorithm that increases the prediction accuracy of its AI-based virtual metrology solution, Panoptes VM (Virtual Metrology).
  • In its second paper, "Universal Denoiser to Improve Metrology Throughput," Gauss Labs introduces a "universal denoiser", which removes random variations (noise) from CD-SEM* images.
  • Through a series of extensive tests with SK hynix, Gauss Labs observed image acquisition time reduced to as much as ¼, compared to conventional technology.
  • Gauss Labs states that this technology is expected to improve the productivity of metrology equipment by 42%.

ETEL’s New TBS Linear Axis Provides Precision and Stability to Semiconductor Manufacturing Equipment

Retrieved on: 
Tuesday, June 14, 2022
TBS, Metrology, CA, GLOBE, Critical dimension, ROI, Linear motor, SAN, Electric motor

SAN JOSE, CA, June 14, 2022 (GLOBE NEWSWIRE) -- With the new TBS Linear Axis offering from ETEL , semiconductor equipment manufacturers can now integrate a high precision linear axis enabling outstanding performance in term of accuracy and precision in its category of one-Degree-Of-Freedom (1-DOF) systems.

Key Points: 
  • SAN JOSE, CA, June 14, 2022 (GLOBE NEWSWIRE) -- With the new TBS Linear Axis offering from ETEL , semiconductor equipment manufacturers can now integrate a high precision linear axis enabling outstanding performance in term of accuracy and precision in its category of one-Degree-Of-Freedom (1-DOF) systems.
  • With its ISO 2 rating for cleanrooms and incorporated HEIDENHAIN Group encoder technologies, the TBS provides high cleanliness and accuracy for any application needing to carry up to 45 kg of payload with high precision and stability of macro and micro motion.
  • The TBS 1-DOF mechanical bearing is based on an indirect drive linear axis that is controlled by a high-performance, low cogging servomotor using a dual encoder feedback control scheme.
  • Any customer who has adapted an alternate solution can receive a hands-on evaluation in order to prove the TBSs superior performance.