Correction: Advantest Unveils E5620 DR-SEM for Review and Classification of Ultra-Small Photomask Defects
With its high-accuracy, high-throughput defect review capability, the E5620 DR-SEM is expected to contribute appreciably to production quality improvements in next-generation photomasks and shorter mask manufacturing turnaround times.
- With its high-accuracy, high-throughput defect review capability, the E5620 DR-SEM is expected to contribute appreciably to production quality improvements in next-generation photomasks and shorter mask manufacturing turnaround times.
- Like its predecessor, the E5620 implements Advantests highly stable image capture technology to easily import defect location data from mask inspection systems and automatically image the locations.
- Advantest will share further details regarding its new E5620 DR-SEM during SEMICON Japan 2022, December 14-16, at Tokyo Big Sight.
- All information supplied in this release is correct at the time of publication, but may be subject to change.